Materials, processes, integration and reliability in advanced interconnects for micro- and nanoelectronics : symposium held April 10-12, 2007, San Francisco, California, U.S.A.

CiNii 所蔵館 3館

書誌事項

タイトル
"Materials, processes, integration and reliability in advanced interconnects for micro- and nanoelectronics : symposium held April 10-12, 2007, San Francisco, California, U.S.A."
責任表示
editors: Qinghuang Lin ... [et al.]
出版者
  • Materials Research Society
出版年月
  • c2007
書籍サイズ
24 cm

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注記

"Symposium B, "Materials, Processes, Integration and Reliability in Advanced Interconnects for Micro- and Nanoelectronics," the MRS "interconnect symposium", held April 10-12 at the 2007 MRS Spring Meeting in San Francisco, California ..."--Pref

Includes bibliographical references and indexes

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