Modelling and simulation of IMEMS : a thesis submitted to the Swiss Federal Institute of Technology Zurich for the degree of Doctor of Technical Sciences

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Bibliographic Information

Title
"Modelling and simulation of IMEMS : a thesis submitted to the Swiss Federal Institute of Technology Zurich for the degree of Doctor of Technical Sciences"
Statement of Responsibility
presented by Jörg Funk
Publisher
  • Swiss Federal Institute of Technology Zurich
Publication Year
  • 1995
Book size
24 cm

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