Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A.

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Bibliographic Information

Title
"Chemical vapor deposition of refractory metals and ceramics III : symposium held November 28-30, 1994, Boston, Massachusetts, U.S.A."
Statement of Responsibility
editors, Bernard M. Gallois, Woo Y. Lee, Michael A. Pickering
Publisher
  • Materials Research Society
Publication Year
  • c1995
Book size
24 cm

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Notes

Includes bibliographical references and index

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