MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK

Name: MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK
Author: Behringer, Uwe F. W., Uttamchandani, Deepak, Society of Photo-optical Instrumentation Engineers, Scottish Enterprise, European Optical Society, Institution of Electrical Engineers

Behringer, Uwe F. W., Uttamchandani, Deepak, Society of Photo-optical Instrumentation Engineers, Scottish Enterprise, European Optical Society, Institution of Electrical Engineers

MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK

CiNii Available at 2 libraries

Behringer, Uwe F. W.
Uttamchandani, Deepak
Society of Photo-optical Instrumentation Engineers
Scottish Enterprise
European Optical Society
Institution of Electrical Engineers

Bibliographic Information

Title: "MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK"

Statement of Responsibility: Uwe F. W. Behringer, Deepak G. Uttamchandani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society [and] IEE--the Institution of Electrical Engineers (UK)

Publisher

SPIE

Publication Year

c2001

Book size: 28 cm

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Notes

Includes bibliographical references and index

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