Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
書誌事項
- タイトル
- "Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing"
- 責任表示
- editors, Jerzy Ruzyllo ... [et al.] ; Electronics Division [of the Electrochemical Society]
- 出版者
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- Electrochemical Society
- 出版年月
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- c1998
- 書籍サイズ
- 23 cm
- タイトル別名
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- Cleaning technology in semiconductor device manufacturing V
この図書・雑誌をさがす
注記
"The Fifth International Symposium of Cleaning Technology in Semiconductor Device Manufacturing was held diring the Fall Meeting [192th] of the Electrochemical Society in Paris [France] in September 1997."--Preface
Includes bibliographical references and indexes
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詳細情報 詳細情報について
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- CRID
- 1130000795337232512
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- NII書誌ID
- BA43170130
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- ISBN
- 1566771889
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- LCCN
- 98158681
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- Web Site
- https://lccn.loc.gov/98158681
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- 本文言語コード
- en
-
- 出版国コード
- us
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- タイトル言語コード
- en
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- 出版地
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- Pennington, NJ
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- 分類
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- LCC: TK7871.85
- DC21: 621.3815/2
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- データソース種別
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- CiNii Books
