Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California

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Bibliographic Information

Title
"Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California"
Statement of Responsibility
Harry L. Stover, chairman/editor
Publisher
  • SPIE--the International Society for Optical Engineering
Publication Year
  • c1982
Book size
28 cm
Series Name / No
  • pbk.

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Notes

"In cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society."

Includes bibliographical references and indexes

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