Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications

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Bibliographic Information

Title
"Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications"
Statement of Responsibility
edited by Klaus K. Schuegraf
Publisher
  • Noyes
  • 2nd ed
Publication Year
  • c2002
Book size
25 cm

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Notes

Includes bibliographies and index

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