Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA

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Bibliographic Information

Title
"Laser and particle-beam chemical processing for microelectronics : symposium held December 1-3, 1987, Boston, Massachusetts, USA"
Statement of Responsibility
editors, Daniel J. Ehrlich, Gregg S. Higashi, Modest M. Oprysko
Publisher
  • Materials Research Society
Publication Year
  • c1988
Book size
24 cm

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Notes

Includes bibliographies and indexes

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