Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology
Bibliographic Information
- Title
- "Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology"
- Statement of Responsibility
- edited by G.R. Srinivasan, K. Taniguchi, C.S. Murthy ; [sponsored by] Electronics Division
- Publisher
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- Electrochemical Society
- Publication Year
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- c1993
- Book size
- 23 cm
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Notes
"The collection of papers included in this volume were presented at the Third International Symposium on Process Physics and Modeling in Semiconductor Technology held in Honolulu, Hawaii, May 19-21, 1993, as part of the Spring Meeting of the Electrochemical Society."
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Details 詳細情報について
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- CRID
- 1130000795603065856
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- NII Book ID
- BA19907961
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- ISBN
- 1566770645
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- LCCN
- 93070053
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- Web Site
- https://lccn.loc.gov/93070053
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, NJ
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- Data Source
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- CiNii Books