Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology

Web Site CiNii Available at 1 libraries

Bibliographic Information

Title
"Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology"
Statement of Responsibility
edited by G.R. Srinivasan, K. Taniguchi, C.S. Murthy ; [sponsored by] Electronics Division
Publisher
  • Electrochemical Society
Publication Year
  • c1993
Book size
23 cm

Search this Book/Journal

Notes

"The collection of papers included in this volume were presented at the Third International Symposium on Process Physics and Modeling in Semiconductor Technology held in Honolulu, Hawaii, May 19-21, 1993, as part of the Spring Meeting of the Electrochemical Society."

Related Books

See more

Details 詳細情報について

  • CRID
    1130000795603065856
  • NII Book ID
    BA19907961
  • ISBN
    1566770645
  • LCCN
    93070053
  • Web Site
    https://lccn.loc.gov/93070053
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, NJ
  • Data Source
    • CiNii Books
Back to top