Optical microlithography IV : March 13-14, 1985, Santa Clara, California
Bibliographic Information
- Title
- "Optical microlithography IV : March 13-14, 1985, Santa Clara, California"
- Statement of Responsibility
- Harry L. Stover, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics
- Publisher
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- SPIE--the International Society for Optical Engineering
- Publication Year
-
- c1985
- Book size
- 28 cm
- Series Name / No
-
- spine : pbk.
- Other Title
-
- Optical microlithography 4
- Optical microlithography four
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Notes
Includes bibliographies
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Details 詳細情報について
-
- CRID
- 1130000795637276928
-
- NII Book ID
- BA2399852X
-
- ISBN
- 0892525738
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- LCCN
- 85061232
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- Web Site
- https://lccn.loc.gov/85061232
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- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TR940
- DC19: 621.381/74
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- Data Source
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- CiNii Books