Optical microlithography IV : March 13-14, 1985, Santa Clara, California

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Bibliographic Information

Title
"Optical microlithography IV : March 13-14, 1985, Santa Clara, California"
Statement of Responsibility
Harry L. Stover, chairman/editor ; cooperating organization, the International Society for Hybrid Microelectronics
Publisher
  • SPIE--the International Society for Optical Engineering
Publication Year
  • c1985
Book size
28 cm
Series Name / No
  • spine : pbk.
Other Title
  • Optical microlithography 4
  • Optical microlithography four

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