Physicas and technology of high-k gate dielectrics : proceedings of the International Symposium on High Dielectric Constant Materials : Materials Science, Processing, and Reliability, and Manufacturing Issues

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書誌事項

タイトル: "Physicas and technology of high-k gate dielectrics : proceedings of the International Symposium on High Dielectric Constant Materials : Materials Science, Processing, and Reliability, and Manufacturing Issues"

責任表示: editors, S. Kar ... [et al.] ; sponsoring divisions: Dielectric Science and Technology, Electronics

出版者

出版年月

シリーズ名/番号

1st: Held in Salt Lake City, Utah, October 20-24, 2004

2nd: Held in Orlando, Florida, October 12-17, 2003

Includes bibliographical references and indexes