Electrochemical processing in ULSI fabrication III : proceedings of the international symposium

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Bibliographic Information

Title
"Electrochemical processing in ULSI fabrication III : proceedings of the international symposium"
Statement of Responsibility
editors, P. C. Andricacos ...[et al.] ; sponsoring divisions, Electrodeposition, Dielectric Science and Technology, Electronics
Publisher
  • Electrochemical Society
Publication Year
  • c2002
Book size
24 cm

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Notes

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130000795696222464
  • NII Book ID
    BA59001824
  • ISBN
    1566772737
  • LCCN
    2002102531
  • Web Site
    https://lccn.loc.gov/2002102531
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, N.J.
  • Data Source
    • CiNii Books
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