Tungsten and other refractory metals for VLSI applications III : proceedings of the 1987 workshop held October 7-9, 1987, IBM Thomas J. Watson Research Center, Yorktown Heights, New York, U.S.A.

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Bibliographic Information

Title
"Tungsten and other refractory metals for VLSI applications III : proceedings of the 1987 workshop held October 7-9, 1987, IBM Thomas J. Watson Research Center, Yorktown Heights, New York, U.S.A."
Statement of Responsibility
editor, Victor A. Wells ; associate editors, Carol M. McConica ...[et al.]
Publisher
  • Materials Research Society
Publication Year
  • c1988
Book size
24 cm

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Notes

Includes bibliography and index

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Details 詳細情報について

  • CRID
    1130000795770524800
  • NII Book ID
    BA20742202
  • ISBN
    0931837847
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pittsburgh, Pa
  • Data Source
    • CiNii Books
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