Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California

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Bibliographic Information

Title
"Micromachining and microfabrication process technology V : 20-22 September, 1999, Santa Clara, California"
Statement of Responsibility
James H. Smith, Jean-Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology ... [et al.]
Publisher
  • SPIE
Publication Year
  • c1999
Book size
28 cm

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Notes

Includes bibliographic references and author index

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