Chemical mechanical polishing 2000 -- fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A.

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Bibliographic Information

Title
"Chemical mechanical polishing 2000 -- fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A."
Statement of Responsibility
editors, Rajiv K. Singh ... [et al.]
Publisher
  • Materials Research Society
  • Cambridge University Press
Publication Year
  • 2013
Book size
23 cm
Series Name / No
  • :pbk

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Notes

Includes bibliographical references and indexes

"First paperback edition 2013"--T.p. verso

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Details 詳細情報について

  • CRID
    1130000795959765504
  • NII Book ID
    BB2767463X
  • ISBN
    9781107413146
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Warrendale, PA
    • Cambridge ; New York
  • Data Source
    • CiNii Books
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