Thin film materials technology : sputtering of compound materials

Web Site CiNii Available at 7 libraries

Bibliographic Information

Title
"Thin film materials technology : sputtering of compound materials"
Statement of Responsibility
by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi
Publisher
  • William Andrew Pub.
  • Springer
Publication Year
  • c2004
Book size
24 cm.
Series Name / No
  • : William Andrew
  • : Springer

Search this Book/Journal

Notes

Includes bibliographical references and index

Details 詳細情報について

  • CRID
    1130000796039227520
  • NII Book ID
    BA68437332
  • ISBN
    0815514832
    3540211187
  • LCCN
    2003018016
  • Web Site
    https://lccn.loc.gov/2003018016
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Norwich, N.Y.
    • Heidelberg
  • Classification
  • Data Source
    • CiNii Books
Back to top