Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000

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Bibliographic Information

Title
"Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000"
Statement of Responsibility
editors, Marc Heyns, Paul Mertens and Marc Meuris
Publisher
  • Scitec Publications
Publication Year
  • c2001
Book size
25 cm

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Notes

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130000796107521024
  • NII Book ID
    BA7192768X
  • ISBN
    3908450578
  • Text Lang
    en
  • Country Code
    sz
  • Title Language Code
    en
  • Place of Publication
    • Uetikon-Zuerich
  • Data Source
    • CiNii Books
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