Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000
CiNii
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Bibliographic Information
- Title
- "Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000"
- Statement of Responsibility
- editors, Marc Heyns, Paul Mertens and Marc Meuris
- Publisher
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- Scitec Publications
- Publication Year
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- c2001
- Book size
- 25 cm
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Notes
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130000796107521024
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- NII Book ID
- BA7192768X
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- ISBN
- 3908450578
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- Text Lang
- en
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- Country Code
- sz
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- Title Language Code
- en
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- Place of Publication
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- Uetikon-Zuerich
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- Data Source
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- CiNii Books