Optical/laser microlithography II, 1-3 March 1989, San Jose, California /Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

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Bibliographic Information

Title
"Optical/laser microlithography II, 1-3 March 1989, San Jose, California /Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering"
Publisher
  • SPIE
Publication Year
  • c1989
Book size
28 cm

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Notes

Includes bibliographies and index

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