Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium

Name: Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium
Author: Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, Sundaram, K. B., Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Electronics Division, Electrochemical Society. High Temperature Materials Division

Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films, Sundaram, K. B., Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Electronics Division, Electrochemical Society. High Temperature Materials Division

Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium

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Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
Sundaram, K. B.
Electrochemical Society. Dielectric Science and Technology Division
Electrochemical Society. Electronics Division
Electrochemical Society. High Temperature Materials Division

書誌事項

タイトル: "Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium"

責任表示: editors, K. B. Sundaram ... [et al.] ; Dielectric Science and Technology and Electronics Divisions, and High Temperature Materials Divisions [of the Electrochemical Society]

出版者

Electrochemical Society

出版年月

c1999

書籍サイズ: 23 cm

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Includes bibliographic references and indexes

Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium

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Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium

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