Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium

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Bibliographic Information

Title
"Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium"
Statement of Responsibility
editors, R.E. Novak ... [et al.] ; assistant editors, L. Shive ... [et al.]
Publisher
  • Electrochemical Society
Publication Year
  • c2000
Book size
24 cm
Other Title
  • Cleaning technology in semiconductor device manufacturing VI

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Notes

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130000796294509056
  • NII Book ID
    BA53256957
  • ISBN
    1566772591
  • LCCN
    00103107
  • Web Site
    https://lccn.loc.gov/00103107
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, NJ
  • Data Source
    • CiNii Books
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