Gettering and deffect engineering in semiconductor technology XIII: GADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Döllnsee-Schorfheide, north of Berlin, Germany, September 26 - October 02, 2009

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Bibliographic Information

Title
"Gettering and deffect engineering in semiconductor technology XIII: GADEST 2009 : proceedings of the XIIIth International Autumn Meeting, Döllnsee-Schorfheide, north of Berlin, Germany, September 26 - October 02, 2009"
Statement of Responsibility
edited by M. Kittler and H. Richter
Publisher
  • Trans Tech Pub.
Publication Year
  • c2010
Book size
25 cm

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130000796372461952
  • NII Book ID
    BB08789066
  • ISBN
    9783908451747
  • Text Lang
    en
  • Country Code
    sz
  • Title Language Code
    en
  • Place of Publication
    • Stafa-Zurich, Switzerland
  • Data Source
    • CiNii Books
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