Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California

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Bibliographic Information

Title
"Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California"
Statement of Responsibility
John C. Stover, chair/editor
Publisher
  • Sponsored and published by SPIE-The International Society for Optical Engineering
Publication Year
  • c1998
Book size
28 cm
Other Title
  • Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 1998 San Jose

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Notes

Includes bibliographical references and index

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