Optical/laser microlithography : 2-4 March 1988, Santa Clara, California

Web Site CiNii Available at 3 libraries

Bibliographic Information

Title
"Optical/laser microlithography : 2-4 March 1988, Santa Clara, California"
Statement of Responsibility
Burn J. Lin, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c1988
Book size
28 cm

Search this Book/Journal

Notes

Includes bibliographies and index

Related Books

See more

Details 詳細情報について

Back to top