Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas

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Bibliographic Information

Title
"Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas"
Statement of Responsibility
Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories
Publisher
  • SPIE--The International Society of Optical Engineering
Publication Year
  • c1996
Book size
28 cm

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