Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas
Bibliographic Information
- Title
- "Micromachining and microfabrication process technology II : 14-15 October, 1996, Austin, Texas"
- Statement of Responsibility
- Stella W. Pang, Shih-Chia Chang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories
- Publisher
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- SPIE--The International Society of Optical Engineering
- Publication Year
-
- c1996
- Book size
- 28 cm
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Details 詳細情報について
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- CRID
- 1130000796714219904
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- NII Book ID
- BA61047748
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- ISBN
- 0819422770
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- LCCN
- 96069473
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- Web Site
- https://lccn.loc.gov/96069473
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
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- Classification
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- LCC: TJ1191.5
- DC21: 621.3815/2
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- Data Source
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- CiNii Books