Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability

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Bibliographic Information

Title
"Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability"
Statement of Responsibility
editors, P. C. Andricacos ...[et al.]
Publisher
  • Electrochemical Society
Publication Year
  • c1999
Book size
23 cm

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Notes

"Dielectric Science and Technology, Electronics, and Electrodeposition Divisions"

Includes bibliographies and indexes

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Details 詳細情報について

  • CRID
    1130000796775755008
  • NII Book ID
    BA43299374
  • ISBN
    1566772001
  • LCCN
    99062262
  • Web Site
    https://lccn.loc.gov/99062262
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, N.J.
  • Data Source
    • CiNii Books
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