Microfabricated Systems and MEMS V : proceedings of the International Symposium

Microfabricated Systems and MEMS, Hesketh, P. J., Electrochemical Society. Sensor Division, Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Electronics Division

Microfabricated Systems and MEMS V : proceedings of the International Symposium

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書誌事項

タイトル: "Microfabricated Systems and MEMS V : proceedings of the International Symposium"

責任表示: editors, P.J. Hesketh ... [et al.]

出版者

Electrochemical Society

出版年月

c2000

書籍サイズ: 24 cm

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"Sensor, Dielectric Science & Technology, and Electronics Divisions"--on T.p

"... held in Phoenix, October 2000. This symposium has had a name change to represent the diversity of subject matter involved in the conference sessions"--on pref

Includes bibliographical references and indexes

Microfabricated Systems and MEMS V : proceedings of the International Symposium

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Microfabricated Systems and MEMS V : proceedings of the International Symposium

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