Rare-earth implanted MOS devices for silicon photonics : microstructural electrical and optoelectronic properties
Bibliographic Information
- Title
- "Rare-earth implanted MOS devices for silicon photonics : microstructural electrical and optoelectronic properties"
- Statement of Responsibility
- Lars Rebohle, Wolfgang Skorupa
- Publisher
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- Springer
- Publication Year
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- c2010
- Book size
- 25 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130000796802808320
-
- NII Book ID
- BB04297514
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- ISBN
- 9783642144462
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- LCCN
- 2010938144
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- Web Site
- https://lccn.loc.gov/2010938144
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- Text Lang
- en
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- Country Code
- gw
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- Title Language Code
- en
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- Place of Publication
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- Heidelberg
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- Classification
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- DC22: 621.39732
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- Subject
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- LCSH: Metal oxide semiconductors
- LCSH: Silicon -- Optical properties
- LCSH: Photonics
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- Data Source
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- CiNii Books
