Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia

CiNii Available at 3 libraries

Bibliographic Information

Title
"Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia"
Statement of Responsibility
Neil W. Bergmann, Olaf Reinhold, Norman C. Tien, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society(Australia), Queensland Government State Development(Australia)
Publisher
  • SPIE--the International Society of Optical Engineering
Publication Year
  • c1999
Book size
28 cm

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Notes

Includes index

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Details 詳細情報について

  • CRID
    1130000796873368064
  • NII Book ID
    BA45648281
  • ISBN
    0819434922
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash.
  • Data Source
    • CiNii Books
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