Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia
CiNii
Available at 3 libraries
Bibliographic Information
- Title
- "Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia"
- Statement of Responsibility
- Neil W. Bergmann, Olaf Reinhold, Norman C. Tien, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society(Australia), Queensland Government State Development(Australia)
- Publisher
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- SPIE--the International Society of Optical Engineering
- Publication Year
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- c1999
- Book size
- 28 cm
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Notes
Includes index
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Details 詳細情報について
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- CRID
- 1130000796873368064
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- NII Book ID
- BA45648281
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- ISBN
- 0819434922
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash.
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- Data Source
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- CiNii Books