Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

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Bibliographic Information

Title
"Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia"
Statement of Responsibility
Bernard Courtois, Serge Demidenko, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), Queensland Government State Development (Australia)
Publisher
  • SPIE
Publication Year
  • c1999
Book size
28 cm

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Notes

Includes bibliographical references and index

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