Bibliographic Information
- Title
- "MEMS & microsystems : design and manufacture"
- Statement of Responsibility
- Tai-Ran Hsu
- Publisher
-
- McGraw-Hill
- International ed
- Publication Year
-
- 2002
- Book size
- 24 cm
- Other Title
-
- MEMS and microsystems : design and manufacture
Search this Book/Journal
Notes
Includes bibliographical references (p. 427-431) and index
- Tweet
Details 詳細情報について
-
- CRID
- 1130000796932382464
-
- NII Book ID
- BA63404777
-
- ISBN
- 0071204768
-
- LCCN
- 2001044737
-
- Web Site
- https://lccn.loc.gov/2001044737
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- New York
-
- Classification
-
- LCC: TK7874.H794
- DC21: 621.381
-
- Subject
-
- LCSH: Microelectronics
- LCSH: Microelectromechanical systems
- LCSH: Microelectronic packaging
-
- Data Source
-
- CiNii Books