Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.

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Bibliographic Information

Title
"Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A."
Statement of Responsibility
editors: S.V. Babu ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • c2000
Book size
24 cm

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Notes

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130000796954897792
  • NII Book ID
    BA46033861
  • ISBN
    1558994734
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Warrendale, PA
  • Data Source
    • CiNii Books
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