Chemical physics of thin film deposition processes for micro- and nano-technologies

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Bibliographic Information

Title
"Chemical physics of thin film deposition processes for micro- and nano-technologies"
Statement of Responsibility
edited by Yves Pauleau
Publisher
  • Kluwer Academic
Publication Year
  • c2002
Book size
25 cm
Series Name / No
  • : pb
Other Title
  • Proceedings of the NATO advanced study institute on chemical physics of thin film deposition processes for micro-and nano-technologies, Kaunas, Lithuania, 3-14 September, 2001

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Notes

Includes index

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Details 詳細情報について

  • CRID
    1130000796966642048
  • NII Book ID
    BA57112551
  • ISBN
    1402005245
    1402005253
  • Text Lang
    en
  • Country Code
    ne
  • Title Language Code
    en
  • Place of Publication
    • Dordrecht
  • Data Source
    • CiNii Books
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