Chemical physics of thin film deposition processes for micro- and nano-technologies
CiNii
Available at 13 libraries
Bibliographic Information
- Title
- "Chemical physics of thin film deposition processes for micro- and nano-technologies"
- Statement of Responsibility
- edited by Yves Pauleau
- Publisher
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- Kluwer Academic
- Publication Year
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- c2002
- Book size
- 25 cm
- Series Name / No
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- : pb
- Other Title
-
- Proceedings of the NATO advanced study institute on chemical physics of thin film deposition processes for micro-and nano-technologies, Kaunas, Lithuania, 3-14 September, 2001
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Notes
Includes index
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Details 詳細情報について
-
- CRID
- 1130000796966642048
-
- NII Book ID
- BA57112551
-
- ISBN
- 1402005245
- 1402005253
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- Text Lang
- en
-
- Country Code
- ne
-
- Title Language Code
- en
-
- Place of Publication
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- Dordrecht
-
- Data Source
-
- CiNii Books