14th annual Symposium on Photomask Technology and Management : proceedings : 14-16 September 1994, Santa Clara, California
Bibliographic Information
- Title
- "14th annual Symposium on Photomask Technology and Management : proceedings : 14-16 September 1994, Santa Clara, California"
- Statement of Responsibility
- William L. Brodsky, Gilbert V. Sheldon, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology
- Publisher
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- SPIE
- Publication Year
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- c1994
- Book size
- 28 cm
- Other Title
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- Fourteenth Annual Symposium on Photomask Technology and Management
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130000797002546432
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- NII Book ID
- BA29175553
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- ISBN
- 0819416533
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- LCCN
- 94067248
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- Web Site
- https://lccn.loc.gov/94067248
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TK7872.M3
- DC20: 621.3815/31
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- Subject
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- Data Source
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- CiNii Books