Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.

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Bibliographic Information

Title
"Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A."
Statement of Responsibility
editors, Arturo A. Ayón ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • c2002
Book size
24 cm
Other Title
  • Materials science of microelectromechanical systems (MEMS) devices 4
  • Materials science of microelectromechanical systems (MEMS) devices four

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Notes

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130000797010887552
  • NII Book ID
    BA57659263
  • ISBN
    1558996230
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Warrendale, Pa.
  • Data Source
    • CiNii Books
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