Plasma processing XIII : proceedings of the international symposium
Bibliographic Information
- Title
- "Plasma processing XIII : proceedings of the international symposium"
- Statement of Responsibility
- editor, G.S. Mathad ; assistant editors, G.K. Celler ... [et al.] ; [cosponsored by] Dielectric Science and Technology and Electronics Divisions
- Publisher
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- Electrochemical Society
- Publication Year
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- c2000
- Book size
- 24 cm
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Notes
Includes bibliographical references and indexes
"The symposium, cosponsored by Dielectric Science & Technology and Electronics Divisions, was held as part of the 197th meeting of the Electrochemical Society, Inc. in Tronto, Canada, May 14-19, 2000"--on "Preface"
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Details 詳細情報について
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- CRID
- 1130000797066445440
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- NII Book ID
- BA54323200
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- ISBN
- 1566772710
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- LCCN
- 00109733
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- Web Site
- https://lccn.loc.gov/00109733
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, N.J.
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- Data Source
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- CiNii Books