Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK

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Bibliographic Information

Title
"Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK"
Statement of Responsibility
Martin Fallon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK)
Publisher
  • SPIE
Publication Year
  • c2001
Book size
28 cm

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Notes

Includes bibliographic references and author index

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