Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK

CiNii 所蔵館 4館

書誌事項

タイトル
"Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK"
責任表示
Martin Fallon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK)
出版者
  • SPIE
出版年月
  • c2001
書籍サイズ
28 cm

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Includes bibliographic references and author index

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