Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium

Web Site CiNii Available at 1 libraries

Bibliographic Information

Title
"Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium"
Statement of Responsibility
editors, P. C. Andricacos ...[et al.]
Publisher
  • Electrochemical Society
Publication Year
  • c1999
Book size
23 cm

Search this Book/Journal

Notes

"Electronics and Dielectric Science and Technology Divisions"

Includes bibliographies and indexes

Related Books

See more

Details 詳細情報について

  • CRID
    1130000797122406528
  • NII Book ID
    BA48975488
  • ISBN
    1566772311
  • LCCN
    99069039
  • Web Site
    https://lccn.loc.gov/99069039
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, N.J.
  • Data Source
    • CiNii Books
Back to top