Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium
Bibliographic Information
- Title
- "Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium"
- Statement of Responsibility
- editors, P. C. Andricacos ...[et al.]
- Publisher
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- Electrochemical Society
- Publication Year
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- c1999
- Book size
- 23 cm
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Notes
"Electronics and Dielectric Science and Technology Divisions"
Includes bibliographies and indexes
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Details 詳細情報について
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- CRID
- 1130000797122406528
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- NII Book ID
- BA48975488
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- ISBN
- 1566772311
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- LCCN
- 99069039
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- Web Site
- https://lccn.loc.gov/99069039
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, N.J.
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- Data Source
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- CiNii Books