Bibliographic Information
- Title
- "Proceedings of the third Symposium on Plasma Processing"
- Statement of Responsibility
- edited by: J. Dieleman, R.G. Frieser, G. S. Mathad
- Publisher
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- Electrochemical Society
- Publication Year
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- c1982
- Book size
- 23 cm
- Other Title
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- Plasma processing
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Notes
Includes bibliographical references and index
"... held during the Autumn meeting of the Electrochemical Society, October 11-16, 1981 in Denver, Colo." -- on pref
Sponsored by: the Dielectrics & Insulation Division and the Electronics Division
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Details 詳細情報について
-
- CRID
- 1130000797371984128
-
- NII Book ID
- BA84886020
-
- LCCN
- 82082859
-
- Web Site
- https://lccn.loc.gov/82082859
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- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
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- Pennington, NJ
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- Classification
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- DC: 530.44
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- Data Source
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- CiNii Books