Proceedings of the third Symposium on Plasma Processing

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Bibliographic Information

Title
"Proceedings of the third Symposium on Plasma Processing"
Statement of Responsibility
edited by: J. Dieleman, R.G. Frieser, G. S. Mathad
Publisher
  • Electrochemical Society
Publication Year
  • c1982
Book size
23 cm
Other Title
  • Plasma processing

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Notes

Includes bibliographical references and index

"... held during the Autumn meeting of the Electrochemical Society, October 11-16, 1981 in Denver, Colo." -- on pref

Sponsored by: the Dielectrics & Insulation Division and the Electronics Division

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