Optical microlithography V : 13-14 March 1986, Santa Clara, California
Bibliographic Information
- Title
- "Optical microlithography V : 13-14 March 1986, Santa Clara, California"
- Statement of Responsibility
- Harry L. Stover, chairman/editor
- Publisher
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- SPIE--the International Society for Optical Engineering
- Publication Year
-
- c1986
- Book size
- 28 cm
- Series Name / No
-
- pbk.
- Other Title
-
- Optical microlithography 5
- Optical microlithography five
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Notes
Includes bibliographies and index
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Details 詳細情報について
-
- CRID
- 1130000797395728000
-
- NII Book ID
- BA24023412
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- ISBN
- 0892526688
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- LCCN
- 86061033
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- Web Site
- https://lccn.loc.gov/86061033
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- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
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- Bellingham, Wash., USA
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- Classification
-
- LCC: TR940
- DC19: 621.381/74
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- Data Source
-
- CiNii Books