Optical microlithography V : 13-14 March 1986, Santa Clara, California
Bibliographic Information
- Title
- "Optical microlithography V : 13-14 March 1986, Santa Clara, California"
- Statement of Responsibility
- Harry L. Stover, chairman/editor
- Publisher
-
- SPIE--the International Society for Optical Engineering
- Publication Year
-
- c1986
- Book size
- 28 cm
- Series Name / No
-
- pbk.
- Other Title
-
- Optical microlithography 5
- Optical microlithography five
Search this Book/Journal
Notes
Includes bibliographies and index
- Tweet
Details 詳細情報について
-
- CRID
- 1130000797395728000
-
- NII Book ID
- BA24023412
-
- ISBN
- 0892526688
-
- LCCN
- 86061033
-
- Web Site
- https://lccn.loc.gov/86061033
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- Bellingham, Wash., USA
-
- Classification
-
- LCC: TR940
- DC19: 621.381/74
-
- Data Source
-
- CiNii Books
