Surface scattering and diffraction for advanced metrology II : 9 July 2002 Seattle, Washington, USA

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Bibliographic Information

Title
"Surface scattering and diffraction for advanced metrology II : 9 July 2002 Seattle, Washington, USA"
Statement of Responsibility
Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations the Boeing Company (USA) ... [et al.]
Publisher
  • SPIE
Publication Year
  • c2002
Book size
28 cm

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Notes

Includes index

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Details 詳細情報について

  • CRID
    1130000797428007552
  • NII Book ID
    BA6196980X
  • ISBN
    0819445479
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash.
  • Data Source
    • CiNii Books
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