Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia

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タイトル: "Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia"

責任表示: Jung-Chih Chiao ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Queensland University of Technology (Australia) ... [et al.] ; cooperating organizations, University of Adelaide (Australia) [and] Centre for Biomedical Engineering, Adelaide (Australia)

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Earlier conferences have title: Device and process technologies for MEMS, microelectronics, and photonics

Includes bibliographical references and index