Metallization : performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California
Bibliographic Information
- Title
- "Metallization : performance and reliability issues for VLSI and ULSI : 12-13 September 1991, San Jose, California"
- Statement of Responsibility
- Gennady S. Gildenblat, Gary P. Schwartz, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- Publisher
-
- SPIE
- Publication Year
-
- c1991
- Book size
- 28 cm
Search this Book/Journal
Notes
"Part of a two-conference program on Rapid Thermal Processing and Metallization held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. v
Includes bibliographical references and index
- Tweet
Details 詳細情報について
-
- CRID
- 1130000797670445696
-
- NII Book ID
- BA26308005
-
- ISBN
- 0819407275
-
- LCCN
- 91067549
-
- Web Site
- https://lccn.loc.gov/91067549
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- Bellingham, Wash.
-
- Classification
-
- LCC: TK7874
-
- Data Source
-
- CiNii Books