Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California

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Bibliographic Information

Title
"Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California"
Statement of Responsibility
Kevin M. Monahan, chairman/editor ; cooperating organizations, Optical Sciences Center/University of Arizona, Institute of Optics/University of Rochester
Publisher
  • SPIE--International Society for Optical Engineering
Publication Year
  • 1985
Book size
28 cm
Series Name / No
  • pbk.

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