Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California
Bibliographic Information
- Title
- "Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California"
- Statement of Responsibility
- Kevin M. Monahan, chairman/editor ; cooperating organizations, Optical Sciences Center/University of Arizona, Institute of Optics/University of Rochester
- Publisher
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- SPIE--International Society for Optical Engineering
- Publication Year
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- 1985
- Book size
- 28 cm
- Series Name / No
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- pbk.
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Notes
Includes bibliographies
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Details 詳細情報について
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- CRID
- 1130000797876059776
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- NII Book ID
- BA24008190
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- ISBN
- 0892526009
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- LCCN
- 85062883
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- Web Site
- https://lccn.loc.gov/85062883
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TK7874
- DC19: 621.381/73
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- Data Source
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- CiNii Books