Chemical Mechanical Planarization : proceedings of the International Symposium

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Bibliographic Information

Title
"Chemical Mechanical Planarization : proceedings of the International Symposium"
Statement of Responsibility
editors, R.L. Opila ... [et al.]
Publisher
  • Electrochemical Society
Publication Year
  • c2001-2003
Book size
24 cm
Series Name / No
  • IV
  • V
  • VI

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Notes

"Dielectric Science and Technology and Electronics Divisions"--on IV T.p

IV:"... held at the 198th Meeting of The Electrochemical Society held in Phoenix, AZ from October 23 to October 25, 2000"--on p. iii

V:"... held at the 201st Meeting of the Electrochemical Society, in Philadelphia, Pennsylvania from May 12th to 17th, 2002" --on p. iii

VI:"... held at the 204th Meeting of the Electrochemical Society, in Orlando, Florida from October 12th to 17th, 2003" --on p. iii

IV: viii, 338 p.

V: vii, 274 p.

VI: vii, 358 p.

Includes bibliographical references and indexes

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