Proceedings of the First International Symposium on Advanced Materials for ULSI

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Bibliographic Information

Title
"Proceedings of the First International Symposium on Advanced Materials for ULSI"
Statement of Responsibility
edited by Martin Scott, Yoichi Akasaka, Rafael Reif
Publisher
  • Electrochemical Society
Publication Year
  • c1988
Book size
23 cm
Other Title
  • First International Symposium on Advanced Materials for ULSI
  • Advanced materials for ULSI

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Notes

Includes bibliographical references and index

Sponsored by: Electronics, Dielectrics and Insulation, and High Temperature Materials Divisions

"... at the 173rd meeting of the Electrochemical Society in Atlanta" -- on pref

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