Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France

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Bibliographic Information

Title
"Design, Test, Integration, and Packaging of MEMS/MOEMS : 9-11 May 2000, Paris, France"
Statement of Responsibility
Bernard Courtois ... [et al.] ; sponsored by CNRS-INPG-UJF(France), The Institute of Electrical and Electronics Engineers, IEEE Computer Society Test Technology Technical Council
Publisher
  • SPIE
Publication Year
  • c2000
Book size
28 cm

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Details 詳細情報について

  • CRID
    1130000798020468096
  • NII Book ID
    BA60204603
  • ISBN
    0819436453
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash.
  • Data Source
    • CiNii Books
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