Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium
Bibliographic Information
- Title
- "Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium"
- Statement of Responsibility
- editors, R.L. Opila ... [et al.]
- Publisher
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- Electrochemical Society
- Publication Year
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- c2000
- Book size
- 24 cm
- Other Title
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- Chemical mechanical planarization in integrated circuit device manufacturing III
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Notes
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130000798057350400
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- NII Book ID
- BA53257304
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- ISBN
- 1566772605
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- LCCN
- 00100975
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- Web Site
- https://lccn.loc.gov/00100975
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, N. J.
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- Data Source
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- CiNii Books