Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.

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Bibliographic Information

Title
"Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A."
Statement of Responsibility
editors, David Hodul ... [et al.]
Publisher
  • Materials Research Society
Publication Year
  • 1989
Book size
24 cm

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Notes

Includes bibliographical references

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