Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing I

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Bibliographic Information

Title
"Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing I"
Statement of Responsibility
edited by Dennis N. Schmidt, assistant editors, David Reedy, Alex Schwarz ; Electronics and Dielectric Science and Technology Divisions
Publisher
  • Electrochemical Society
Publication Year
  • c1992
Book size
23 cm

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130000798131363840
  • NII Book ID
    BA19556991
  • ISBN
    156677022X
  • LCCN
    92073946
  • Web Site
    https://lccn.loc.gov/92073946
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, N.J.
  • Data Source
    • CiNii Books
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